I roto i te hanga papa whakarewa haurua-haurua, he mahi nui, he mahi tika hoki te tukanga whakapūtātanga e whakatau ana i te hua o te maramara. Hei "matua o te whakaaturanga me te whakaahua" i roto i te tukanga hanga papa whakarewa, ka hipokina e te whakapūtātanga te tukanga mahi katoa—tae atu ki te paninga hurihuri, te whakaaturanga, te whanaketanga, te whakairo, me te horoi mākū—ā, ka whakatakoto i ngā whakaritenga tino pakari mō te horoi taiao, te whakahaere poke, te tiaki hiko-pūmau, me te ātete matū. Ka taea e ngā matūriki puehu taumata-micron, te hekenga katote iti, me ngā tukunga hiko-pūmau poto katoa te whakaputa tika i ngā hapa photoresist, te he o te tauira, te waikura papa whakarewa, me ngā ara iahiko poto-poto i roto i ngā ara iahiko, ka arahi ki te tango i ngā papa whakarewa katoa, ā, ka hua ake he mate nui o te whakaputanga. He maha ngā FAB e raru ana ki te whakapai ake i te hua o ā rātou tukanga whakapūtātanga whakaahua. Ahakoa kei te pai ngā taputapu, ngā tukanga, me ngā tawhā taiao, ko te aukati he maha ngā wā kei roto i ngā taonga tiaki ringa e ahua iti ana te rahi. Ko ngā karapu rūma ma o te Akomanga 1,000 noa, ko ngā karapu rūma ma o te taumata ahumahi rānei, kāore e tino pai mō ngā paerewa tino teitei o te tukanga whakapūtātanga whakaahua.
He aha i tino āraia ai te whakamahi i ngā karapu rūma ma noa i roto i te tukanga tuhi?
Ka pā te paru photoresist i te toenga paura
Ka waikura ngā ara iahiko o ngā papa i te nui rawa o te whanariki me te hauota.
I kore e taea te whakahaere i te hiko pateko, ā, ka pakaru te anga whakaahua tika.
Te pakarukaru me te marere, ka hua ake he hapa o ngā mea ke i roto i te tukanga hangahanga
Ngā Karapu Nitrile Kore-Paura LjieClean Akomanga 100
Kei te arotahi a Suzhou Leader ki te rāngai hanga wafer semiconductor, me te aro atu ki ngā āhuatanga uaua o te tukanga tuhi. Kua whakawhanakehia e mātou he karapu nitrile motuhake, kāore he paura, he iti te hau e puta ana i te Class 100, e tino tutuki ai ngā whakaritenga whakaputa o te tukanga tuhi wafer katoa, e hanga ana i ēnei hei taonga tiaki pai mō ngā kamupene hanga me ngā kamupene tākai me te whakamātautau wafer maha.
1. Tukanga Kore-Paura i runga i te Dichloride: kāore he poke paura i roto i te Tukanga Whakaahua-whakaahua
Mā te whakamahi i tētahi tukanga purenga chlorine motuhake-haurua-irahiko, kāore e hiahiatia he tāpiringa tāpiri pēnei i te talc, te māngaro witi, te hinu silicone rānei mō tēnei tikanga puta noa i te tukanga katoa. Ka whakarite kia maeneene te tono puta noa i te tukanga, ka whakakorea ngā matūriki paura me ngā toenga hinu silicone e poke ana i te photoresist i te pūtake, ā, ka tino whakatauhia ngā hapa matūriki ke i roto i te tukanga photolithography.
2 Mā te horoi wai tino parakore maha-wāhanga ka iti te whanariki, te iti te māota, me te iti o te ihirangi katote
Mā roto i ngā huringa maha o te horoi hohonu ki te wai parakore, ka tangohia ngā tāpiri rauemi mata me ngā toenga mata. Ka tino whakahaeretia te nui o te whanariki, te haurore, me ngā katote konganuku wairewa, ka hua ake he iti te NVR (toenga kore-pohehe). Mā tēnei ka ārai i te waikura o ngā wafer, te waikura paninga, me ngā hapa whakairo, ka tino hototahi ngā karapu ki ngā tukanga tuhi whakaahua uaua mō ngā wafer 8- me te 12-inihi.
3 Parenga ESD Kua Whakarerekētia i roto i te Pokepoke hei Tiaki i ngā Wafers Tairongo-Hiko
He rerekē ki ngā karapu ārai-pūmau e wātea ana i te hokohoko me ngā paninga rehu rangitahi, ka whakamahia e Gonars tētahi hangarau whakarerekētanga ārai-pūmau i roto i te pokepokea ai i runga i te rauemi turanga nitrile. Mā tēnei ka whakarite i te ātete mata pumau me te ōrite, ka horapa tonu te hiko pūmau puta noa i te tukanga katoa hei ārai i te kohikohinga pūmau ka pakaru pea te ātete-whakaahua me te kino ki ngā ara iahiko wafer tino tika. He pai mō ngā mahi matua o te lithography pēnei i te whakaaturanga me te whanaketanga.
4. Ngāwari, Ātaahua hoki te Taunga, He pai mō ngā Mahi Tika Taumata-Maikoron
He ngāwari te rauemi o te karapu, ā, e rite ana ki te āhua o te ringaringa. He hoahoa kakano kore-paheke kei ngā pito o te ringaringa, he mama, kāore hoki e matotoru, he mea tino pai mō ngā mahi tino tika pērā i te whakahaere i te wafer photolithography, te whakatikatika taputapu, me te tirotiro tino tika. Ka whakarato i te nekehanga kore here, ā, ka ārai i te paheke, ka whakaiti i te kino i puta mai i ngā tukinga tūpono i te wā e mahi ana ā-ringa. Hei tāpiri, he ātete ki ngā whakarewa photolithography me ngā waikawa ngawari me ngā kawakore, ā, ka mau tonu te pakari me te kore e tawhito, e haehae rānei ahakoa te whakamahinga roa.
5
✅ Ka whakakorea e te takai hiri-rua-paparanga te poke tuarua
Ka tākaihia ngā hua kua oti puta noa i te tukanga katoa i roto i tētahi rūma ma o te Akomanga 100 mā te whakamahi i te takai hiri-rua-paparanga, e wehea katoatia ai i te puehu me te makuku i te wā e rongoa ana me te kawe ana. Kāore he poke tuarua i te whakatuwheratanga o te takai, e āhei ai te whakamahi tonu i roto i ngā rūma ma o te Akomanga 100.
Wā tuku: Hurae-23-2026