Ngā Karapu Chloroprene Iti 9-inihi o Lijiejing: Te Paerewa Hou mō te Tiakitanga Ma mō te Hanganga Ārahi-Haumaru

I roto i te horopaki o ngā whakaritenga "kore-hapa" e piki haere ana te kaha o te hanga irahiko, kua noho ngā karapu nitrile iti-hauora 9-inihi a Lijie hei taputapu tiaki tino nui i roto i ngā wāhanga tukatuka wafer me te takai maramara nā te iti o te toenga ionic me te mahi horoi teitei. Mā te tukatuka motuhake, ka tino whakahaerehia te ihirangi chlorine o te karapu i te ≤50ppm—he nui ake i te paerewa ahumahi o te 100ppm. Mā tēnei ka ārai i ngā tūponotanga waikura i puta mai i te hekenga o te ion chloride ki runga i ngā mata wafer, ka tutuki i ngā whakaritenga pakari a te hanga irahiko mō te whakahaere poke moroiti.

I roto i ngā tukanga whakapūkara, ka pā tika te ma o ngā karapu ki te tika o te paninga photoresist me ngā hua o te whakaaturanga. I hangaia i roto i ngā rūma ma o te Akomanga 100,000, ā, i tangohia te puehu laser, ka whakaatuhia e tēnei hua te tukunga matūriki mata i raro i te 0.2 matūriki/inihi tapawhā—e tutuki ana i ngā paerewa rūma ma o te Akomanga 3 ISO. Ka ārai pai tēnei i te piri o te matūriki moroiti ki ngā mata wafer, ā, ka whakaitihia ngā hapa whakapūkara. Ko te hoahoa roa 9-inihi e whakarato ana i te kapi katoa mai i te ringaringa ki te nikau. I te whakakotahitanga me te hanganga poroporo rapa, ka whakarite i te ngāwari o te mahi me te ārai pai i te maturuturunga puehu i te whakatuwheratanga o te ringaringa, e tutuki ana i ngā whakaritenga pakari mō ngā taiao ma hihiri i roto i ngā tukanga whakapūkara.

I roto i ngā tukanga e whakamahi ana i ngā matū waikura nui pērā i te whakairo me te whakaurunga katote, ka whakaatuhia e ēnei karapu he ātete matū tino pai. I muri i te whakamātautau rumaki 24-hāora i roto i ngā matū haurua-haurua noa pērā i te waikawa hauwaiwai me te waikawa phosphoric, kāore e puta he pupuhi, he ngatata rānei, me te tere huringa taumaha i raro i te 0.8%. Mā tēnei ka whakaratohia he tiaki ringa pono mō ngā kaiwhakahaere me te whakakore i ngā tūponotanga poke matū mai i te kino o te karapu. Kei ngā matimati he kakano ārai-paheke kua whakairohia ki te taiaho 0.02mm, e whakanui ana i te waku mā te 35% i te wā e whakahaere ana i ngā wafer 12-inihi me te whakaiti i te tūponotanga o te paheke o te wafer mā te 60%. Mā tēnei ka tutuki he taurite i waenga i te haumaru tiaki me te pumau mahi.

Kua whakamanahia ēnei karapu ki ngā paerewa SEMI F57, ā, kei te whakamahia i roto i ngā raina whakaputa papatipu i ngā whare hanga matua tae atu ki a SMIC me Hua Hong Semiconductor. Ka whakaitihia e rātou te tere o te para o ngā wafer i puta mai i te pa o te ringa mā te 38%, ka whakatūria hei whiringa pai i roto i te hanga semiconductor hei whakataurite i te tiakitanga rūma ma me te whai huatanga o te mahi.